March 30, 2010
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Agreement with 3M to manufacture and sell equipment for temporary wafer bonding technology that enables 3-D semiconductors

Yushin Precision Equipment Co., Ltd., agreed today to a non-exclusive agreement with 3M (headquartered in Minnesota, U.S.A.), a leading supplier of advanced materials to the semiconductor industry, to manufacture and sell equipment for temporary wafer bonding technology that is necessary for 3-D semiconductors.

As part of this agreement, Yushin Precision Equipment becomes a 3M Authorized Equipment Supplier for equipment that is configured to use 3M Wafer Support System (WSS) materials including 3M’s Liquid UV-Curable Adhesive and Light-To-Heat Conversion coating. The equipment will henceforth be available globally.

The 3M Wafer Support System includes equipment and materials that allow for temporary wafer bonding to support wafer thinning and subsequent processing of ultrathin wafers for 3D packaging. 3M’s innovative use of bonding/debonding technologies enables robust wafer support throughout different processes such as wafer grinding, photolithography, etching, deposition, and metallization. The UV curable adhesive bonds the wafer to the glass carriers and minimizes warpage and stress thereby enabling wafer thinning. Moreover, the removal of the adhesive and glass carriers is done through a complete dry process.

The equipment is comprised of three main devices called the “mounter”, which bonds the wafer to the glass carriers, the “demounter”, which removes the UV curable adhesive and glass carriers after wafer thinning, and the “recycler”, which collects the glass carriers and purify/coat them for reuse.

Since 2004 Yushin Precision Equipment has worked with 3M to design and develop equipment for temporary bonding of ultrathin wafers. The agreement allows customers to simplify the equipment sales and support process by purchasing the equipment directly from Yushin Precision Equipment. This also enables 3M to focus on materials development for 3-D semiconductors that customers demand. Both companies will continue to work closely to address customer demands for high-performance process solutions that support high-volume manufacturing with a competitive cost of ownership.

[Yushin Precision Equipment Co., Ltd.]
Inquiries:
PR and Marketing Development Group Directors Tomohiro Inano, Taku Hashimoto
Tel: ＋81-75-933-9555
Headquarters: 11-260 Kogahonmachi, Fushimi-ku, Kyoto